
( Brand: Thk ), ( Manufacturer Part Number: KR30 ), ( Part Type: Linear )
The Tokyo Electron Tel Rotation Wafer Kr30 is a high-performance wafer handling system designed for precision and efficiency in the semiconductor manufacturing industry. With a travel length of 29 centimeters and a waist diameter of 200 millimeters, this linear motor stage is ideal for handling and rotating wafer sizes commonly used in the fabrication of integrated circuits.
The Kr30 features a linear motor drive system, which provides smooth and precise motion with low vibration and high repeatability. The motor is capable of delivering a maximum speed of 1000 mm/s and a maximum acceleration of 1000 mm/s 2, allowing for fast and efficient wafer handling operations. The stage also includes a brushless servo motor and a feedback encoder, ensuring precise positioning and high-resolution control.
The stage is built with a robust and durable construction, featuring a high-precision, low-friction linear guide system. The linear guide is made of high-grade stainless steel, providing excellent corrosion resistance and longevity. The Kr30 is also designed with a high load capacity, capable of handling wafer weights up to 30 kg, making it suitable for use with a wide range of wafer sizes and materials.
The Tel Rotation Wafer Kr30 also includes a variety of optional features, such as a vacuum chuck for secure wafer attachment, a temperature control system for maintaining wafer temperature during processing, and a wafer alignment system to ensure precise positioning. The stage is also compatible with various automation software packages, allowing for easy integration into existing production lines.
Overall, the Tokyo Electron Tel Rotation Wafer Kr30 is a high-performance and versatile wafer handling solution for the semiconductor industry, providing precise and efficient wafer handling, rotation, and alignment capabilities, while also offering a robust and durable construction for long-term use.
Pros of buying a Tokyo Electron Tel rotation wafer Kr30 linear with a 200mm diameter and 29cm travel:1. High precision: This wafer stepper is known for its high precision, ensuring accurate and consistent results in semiconductor manufacturing.
2. Large wafer size: Its 200mm diameter allows for the production of larger semiconductor chips, increasing yield and reducing costs.
3. Reliability: As a product from Tokyo Electron, a leader in semiconductor manufacturing equipment, it is known for its reliability and durability.
4. Customizable options: The wafer stepper can be customized to meet specific manufacturing requirements, including different lithography processes and wavelengths.
Cons of buying a Tokyo Electron Tel rotation wafer Kr30 linear with a 200mm diameter and 29cm travel:1. High cost: This equipment is expensive, with a price tag that may be out of reach for smaller semiconductor manufacturers.
2. Complex operation: The wafer stepper requires specialized knowledge and training to operate and maintain, increasing the overall cost of ownership.
3. Space requirements: The equipment is large and requires a significant amount of floor space, which may not be available in smaller manufacturing facilities.
Conclusion:The Tokyo Electron Tel rotation wafer Kr30 linear with a 200mm diameter and 29cm travel is a high-quality, precision wafer stepper that is well-suited for semiconductor manufacturing. However, its high cost and complex operation may make it a difficult purchase for smaller manufacturers. If budget and expertise are not a concern, this equipment can provide significant benefits in terms of yield and consistency in semiconductor manufacturing.
Recommendation:For smaller manufacturers, it may be more cost-effective to consider alternative equipment options with smaller wafer sizes and lower precision. However, if a high-precision, large-wafer solution is necessary, Tokyo Electron offers a range of options that can be customized to meet specific manufacturing requirements. It is important to carefully consider the specific needs and budget of the manufacturer before making a purchase decision.
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Notes: this was removed from a decommissioned system and the motors for x y axes never got to us. No other testing was done.
Manufacturer: Thk condition: for parts or not working.
Warranty the items in this listing are sold as-is no. Comes in non-original packaging.
Included: 1 tel KR30-based wafer handling module specifications: manufacturer: tokyo electron ltd 3-axis robot 29cm x axis, 23cm y plus theta rotation 50mm diameter chuck formerly used with 200mm semiconductor wafers linear modules: Thk KR30 series no motors are included. Items are described to the best of our ability.
This lot is in good cosmetic condition with a bit of dust and grease residues from prior use.
Home contact about technology industrial lab test electrical semiconductor tokyo electron tel x y rotation 200mm wafer stage Thk KR30 linear 29cm travel manufacturer: model: condition: for parts or not working price: the photos show exact items buyer will receive.
The linear axes rotate smoothly by hand and rotary axis moves easily also.